Nucleation and orientation of sol-gel PZT-films on Pt electrodes

被引：52

作者：

Willems, GJ ^{[1
]}

Wouters, DJ ^{[1
]}

Maes, HE ^{[1
]}

Nouwen, R ^{[1
]}

机构：

[1] LIMBURGS UNIV CTR,B-3590 DIEPENBEEK,BELGIUM

来源：

INTEGRATED FERROELECTRICS | 1997年 / 15卷 / 1-4期

关键词：

D O I：

10.1080/10584589708015693

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The nucleation and preferential orientation of Lead Zirconate-Titanate (PZT) films deposited by sol-gel spin-coating on Pt bottom electrodes is discussed. The crucial role of the Ti adhesion layer is highlighted. A qualitative crystallization model is presented which can explain the nucleation behavior of PZT-films with different Zr/Ti-ratios on different electrode structures as well as the preferential orientation of the PZT-film.

引用

页码：19 / 28

页数：10

共 9 条

[1]

Al-Shareef H. N., 1993, Integrated Ferroelectrics, V3, P321, DOI 10.1080/10584589308216687

[2] EFFECTS OF TITANIUM BUFFER LAYER ON LEAD-ZIRCONATE-TITANATE CRYSTALLIZATION PROCESSES IN SOL-GEL DEPOSITION TECHNIQUE [J].