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Measurement of piezoelectric displacements of Pb(Zr, Ti)O3 thin films using a double-beam interferometer

被引：21
作者：
Maiwa, H
Christman, JA
Kim, SH
Kim, DJ
Maria, JP
Chen, B
Streiffer, SK
Kingon, AI
机构：
[1] N Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27695 USA
[2] N Carolina State Univ, Dept Phys, Raleigh, NC 27695 USA
[3] ATMI Inc, Danbury, CT 06810 USA
[4] Argonne Natl Lab, Div Mat Sci, Argonne, IL 60439 USA
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 9B期
关键词：
piezoelectric properties; double-beam interferometry; PZT; MEMS; AFM;
D O I：
10.1143/JJAP.38.5402
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The double-beam interferometric method is applied to measure the field-induced displacement of Pb(Zr, Ti)O-3 thin films. The dc electric field dependence of the longitudinal piezoelectric coefficient (d(33)) response of Pb(Zr, Ti)O-3 thin films deposited by metal organic chemical vapor deposition (MOCVD) was measured. Experimental d(33) values were compared with coefficients calculated using a phenomenological approach and bulk parameters. Qualitative agreement was obtained between measured and calculated coefficients.
引用
收藏
页码：5402 / 5405
页数：4
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