Piezoelectric measurements with atomic force microscopy

被引：263

作者：

Christman, JA ^{[1
]}

Woolcott, RR

Kingon, AI

Nemanich, RJ

机构：

[1] N Carolina State Univ, Dept Phys, Raleigh, NC 27695 USA

[2] N Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27695 USA

来源：

APPLIED PHYSICS LETTERS | 1998年 / 73卷 / 26期

关键词：

D O I：

10.1063/1.122914

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An atomic force microscope (AFM) is used to measure the magnitude of the effective longitudinal piezoelectric constant (d(33)) of thin films. Measurements are performed with a conducting diamond AFM tip in contact with a top electrode. The interaction between the tip and electric field present is a potentially large source of error that is eliminated through the use of this configuration and the conducting diamond tips. Measurements yielded reasonable piezoelectric constants of X-cut single-crystal quartz, thin film ZnO, and nonpiezoelectric SiO2 thin films. (C) 1998 American Institute of Physics. [S0003-6951(98)01852-X].

引用

页码：3851 / 3853

页数：3

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