Constructing single- and multiple-helical microcoils and characterizing their performance as components of microinductors and microelectromagnets

被引：62

作者：

Rogers, JA ^{[1
]}

Jackman, RJ ^{[1
]}

Whitesides, GM ^{[1
]}

机构：

[1] HARVARD UNIV,DEPT CHEM & BIOL CHEM,CAMBRIDGE,MA 02138

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 1997年 / 6卷 / 03期

基金：

加拿大自然科学与工程研究理事会; 美国国家科学基金会;

关键词：

coils; electromagnets; fabrication; ferromagnetic materials/devices; inductors; microelectromechanical devices;

D O I：

10.1109/84.623106

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes a means for producing single- and multiple-helical microcoils by using microcontact printing to print lines on cylinders, This method was used to fabricate coils made of wires with widths and spaces between 150-25 mu m wrapped around cylinders with diameters between 100-400 mu m. Results show that microelectromagnets using these microcoils produce magnetic flux densities in excess of 0.4 T and can be switched on and off on a submillisecond time scale.

引用

页码：184 / 192

页数：9

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