New realization method for three-dimensional photonic crystal in optical wavelength region

被引：109

作者：

Noda, S

Yamamoto, N

Sasaki, A

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1996年 / 35卷 / 7B期

关键词：

photonic crystal; wafer-bonding; microfabrication; photonic bandgap; three-dimensional structure;

D O I：

10.1143/JJAP.35.L909

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A new realization method for three-dimensional photonic crystals in the optical wavelength region is proposed. Microfabrication techniques using wafer-bonding, selective etching, and laser beam deflection pattern observation techniques are successfully combined, and the feasibility of the proposed method is experimentally demonstrated.

引用

页码：L909 / L912

页数：4

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