Hydrogenated microcrystalline silicon for photovoltaic applications

被引:31
作者
Wyrsch, N
Torres, P
Goerlitzer, M
Vallat, E
Kroll, U
Shah, A
Poruba, A
Vanecek, M
机构
[1] Univ Neuchatel, Inst Microtech, CH-2000 Neuchatel, Switzerland
[2] Acad Sci Czech Republ, Inst Phys, CZ-16200 Prague 6, Czech Republic
关键词
microcrystalline silicon; solar cells; opto-electronic properties;
D O I
10.4028/www.scientific.net/SSP.67-68.89
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Undoped hydrogenated microcrystalline silicon layers have been deposited by plasma CVD at low temperature at different power and silane dilution. Structural, optical and electrical properties of these layers have been investigated and are discussed in view of the deposition conditions. Entirely microcrystalline n-i-p solar cells have been deposited, incorporating the same layers as the intrinsic (i-) layer, in order to compare material and cell properties and identify the parameters important for photovoltaic applications.
引用
收藏
页码:89 / 100
页数:12
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