Enhanced optical absorption in microcrystalline silicon

被引:50
作者
Beck, N
Meier, J
Fric, J
Remes, Z
Poruba, A
Fluckiger, R
Pohl, J
Shah, A
Vanecek, M
机构
[1] ACAD SCI CZECH REPUBL, INST PHYS, CR-16200 PRAGUE 6, CZECH REPUBLIC
[2] UNIV NEUCHATEL, INST MICROTECHNOL, CH-2000 NEUCHATEL, SWITZERLAND
[3] UNIV KONSTANZ, FAC PHYS, D-78434 CONSTANCE, GERMANY
关键词
D O I
10.1016/0022-3093(96)00080-4
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
An enhanced optical absorption, compared to crystalline silicon, was observed in the above gap region together with very low defect-connected absorption in microcrystalline silicon (mu c-Si:H) prepared by very high frequency glow discharge technique at 70 MHz. As the mu c-Si:H material has a very low fraction of amorphous phase, a 'crystalline silicon like' absorption model is proposed which associates most absorption properties of mu c-Si:H to the crystalline phase in the material. Thereby the influence of internal strain, microcrystallite boundaries, hydrogen content and elastic light scattering on the absorption properties are discussed.
引用
收藏
页码:903 / 906
页数:4
相关论文
共 15 条
  • [1] INTRINSIC OPTICAL ABSORPTION IN GERMANIUM-SILICON ALLOYS
    BRAUNSTEIN, R
    MOORE, AR
    HERMAN, F
    [J]. PHYSICAL REVIEW, 1958, 109 (03): : 695 - 710
  • [2] LIGHT-SCATTERING EFFECTS IN CPM AND PDS MEASUREMENT ON A-SI-H FILMS
    FAVRE, M
    CURTINS, H
    VANECEK, M
    [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1989, 114 : 405 - 407
  • [3] GODET C, 1987, THESIS U PARIS SUD
  • [4] OPTICAL-ABSORPTION IN HYDROGENATED MICROCRYSTALLINE SILICON
    IQBAL, Z
    SAROTT, FA
    VEPREK, S
    [J]. JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1983, 16 (10): : 2005 - 2015
  • [5] DENSITY OF GAP STATES OF SILICON GRAIN-BOUNDARIES DETERMINED BY OPTICAL-ABSORPTION
    JACKSON, WB
    JOHNSON, NM
    BIEGELSEN, DK
    [J]. APPLIED PHYSICS LETTERS, 1983, 43 (02) : 195 - 197
  • [6] LIU HN, 1993, J NONCRYST SOLIDS, V164, P1005
  • [7] MEIER J, 1994, P 1 WCPVEC HAW, P405
  • [8] HYDROGEN PASSIVATION OF GRAIN-BOUNDARY DEFECTS IN POLYCRYSTALLINE SILICON THIN-FILMS
    NICKEL, NH
    JOHNSON, NM
    JACKSON, WB
    [J]. APPLIED PHYSICS LETTERS, 1993, 62 (25) : 3285 - 3287
  • [9] PHOTOTHERMAL DEFLECTION SPECTROSCOPY OF HYDROGENATED AMORPHOUS-SILICON AT LOW ENERGIES AND AT LOW-TEMPERATURES
    NONOMURA, S
    NISHIWAKI, T
    NITTA, S
    [J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1994, 69 (02): : 335 - 348
  • [10] BAND STRUCTURE OF INTERMETALLIC SEMICONDUCTORS FROM PRESSURE EXPERIMENTS
    PAUL, W
    [J]. JOURNAL OF APPLIED PHYSICS, 1961, 32 : 2082 - &