Pd/porous-GaAs Schottky contact for hydrogen sensing application

被引:71
作者
Salehi, A [1 ]
Nikfarjam, A [1 ]
Kalantari, DJ [1 ]
机构
[1] KN Toosi Univ Technol, Lab Device Fabricat, Dept Elect Engn, Tehran, Iran
来源
SENSORS AND ACTUATORS B-CHEMICAL | 2006年 / 113卷 / 01期
关键词
porous GaAs; Scottky contact; hydrogen gas detection; interface; SEM;
D O I
10.1016/j.snb.2005.03.064
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
The potential of Pd/porous-GaAs Schottky contacts for hydrogen detection at room temperature is presented. The Pd/porous-GaAs contacts were developed using an electrochemical system in our laboratory. Using both forward- and reverse current-voltage (I-V) characteristics we have found that the Pd/porous-GaAs Schottky diode sensor exhibited very high sensitivity towards hydrogen gas. The Pd/porous-GaAs diode sensor submitted to 500 ppm hydrogen gas at room temperature revealed a considerable increase in sensitivity of more than three times higher than that of the Pd/GaAs sample. The significant changes observed here have been found to be due to the results of a decrease in effective barrier height of the Schottky contact. This is due to a lowering of metal work function and eventually the creation of a dipole layer on the semiconductor surface induced by dissociation of hydrogen atoms on the I'd contact, followed by diffusion to the Pd/porous-GaAs interface. A comparative study has been conducted to show the differences between Pd/GaAs and the Pd/porous-GaAs Schottky contacts fabricated at different conditions and subjected to hydrogen gas at various operating temperatures. Scanning electron microscopy (SEM) was used to examine the porosity of the GaAs surfaces. SEM pictures showed highly porous structures of the Pd/porous-GaAs Schottky contacts provided for penetration of hydrogen gas molecules. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:419 / 427
页数:9
相关论文
共 23 条
[1]   Comparison of interfacial and electronic properties of annealed Pd/SiC and Pd/SiO2/SiC Schottky diode sensors [J].
Chen, LY ;
Hunter, GW ;
Neudeck, PG ;
Bansal, G ;
Petit, JB ;
Knight, D .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1997, 15 (03) :1228-1234
[2]   SENSING REDUCING GASES AT HIGH-TEMPERATURES USING LONG-TERM STABLE GA2O3 THIN-FILMS [J].
FLEISCHER, M ;
MEIXNER, H .
SENSORS AND ACTUATORS B-CHEMICAL, 1992, 6 (1-3) :257-261
[3]  
Ghita RV, 2002, CRYST RES TECHNOL, V37, P323, DOI 10.1002/1521-4079(200204)37:4<323::AID-CRAT323>3.0.CO
[4]  
2-H
[5]   Current conduction mechanism and gas adsorption effects on device parameters of the Pt/SnOx/diamond gas sensor [J].
Gurbuz, Y ;
Kang, WP ;
Davidson, JL ;
Kerns, DV .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1999, 46 (05) :914-920
[6]   Comparison of MOS and Schottky W/Pt-GaN diodes for hydrogen detection [J].
Kang, BS ;
Kim, S ;
Ren, F ;
Gila, BP ;
Abernathy, CR ;
Pearton, SJ .
SENSORS AND ACTUATORS B-CHEMICAL, 2005, 104 (02) :232-236
[7]   Effects of crystal structures on gas sensing properties of nanocrystalline ITO thick films [J].
Kim, BC ;
Kim, JY ;
Lee, DD ;
Lim, JO ;
Huh, JS .
SENSORS AND ACTUATORS B-CHEMICAL, 2003, 89 (1-2) :180-186
[8]   Characteristics of Pd/InGaP Schottky diodes hydrogen sensors [J].
Lin, KW ;
Chen, HI ;
Chuang, HM ;
Chen, CY ;
Lu, CT ;
Cheng, CC ;
Liu, WC .
IEEE SENSORS JOURNAL, 2004, 4 (01) :72-79
[9]   A new Pd-oxide-Al0.3Ga0.7As MOS hydrogen sensor [J].
Lu, CT ;
Lin, KW ;
Chen, HI ;
Chuang, HM ;
Chen, CY ;
Liu, WC .
IEEE ELECTRON DEVICE LETTERS, 2003, 24 (06) :390-392
[10]   CO response of a nanostructured SnO2 gas sensor doped with palladium and platinum [J].
Ménini, P ;
Parret, F ;
Guerrero, M ;
Soulantica, K ;
Erades, L ;
Maisonnat, A ;
Chaudret, B .
SENSORS AND ACTUATORS B-CHEMICAL, 2004, 103 (1-2) :111-114