Radial structure of the kinetics and production of electrons in the dc column plasma

被引:29
作者
Uhrlandt, D
Winkler, R
机构
[1] Inst. Niedertemperatur-Plasmaphysik, 17489 Greifswald
关键词
spatially inhomogeneous Boltzmann equation; electron velocity distribution function; positive column; dc glow discharge;
D O I
10.1007/BF01447007
中图分类号
TQ [化学工业];
学科分类号
0817 ;
摘要
The detailed radial structure of the electron kinetics in the positive column of cylindrical de glow discharges is investigated to reveal the microscopic nature of the electron confinement by the radial space charge potential and the spatial dependences of the macroscopic electron quantities. Therefore, in order to determine the radial variation of the isotropic and anisotropic parts of the electron velocity distribution function the relevant inhomogeneous kinetic equation is solved taking into account the radial electric field action. The kinetic description includes the self-consistent calculation of the excited gas atom densities by solving their radially inhomogeneous particle balance equations. This permits one to determine accurately the electron production in the volume which is often dominated by ionization of excited atoms. Besides the main aspects of the numerical approach, results for a neon and krypton glow discharge are presented The discussion includes a detailed analysis of the local electron energy balance equation.
引用
收藏
页码:517 / 545
页数:29
相关论文
共 20 条
[1]   ELECTRON ENERGY DISTRIBUTIONS IN STATIONARY DISCHARGES [J].
BERNSTEIN, IB ;
HOLSTEIN, T .
PHYSICAL REVIEW, 1954, 94 (06) :1475-1482
[2]   NUMERICAL-SOLUTION OF THE SPATIALLY INHOMOGENEOUS BOLTZMANN-EQUATION AND VERIFICATION OF THE NONLOCAL APPROACH FOR ARGON PLASMA [J].
BUSCH, C ;
KORTSHAGEN, U .
PHYSICAL REVIEW E, 1995, 51 (01) :280-288
[3]   RADIALLY DEPENDENT SOLUTIONS OF BOLTZMANN-EQUATION IN LOW-TEMPERATURE PLASMAS USING A MODIFIED 2-TERM EXPANSION [J].
HARTIG, MJ ;
KUSHNER, MJ .
JOURNAL OF APPLIED PHYSICS, 1993, 73 (03) :1080-1090
[4]  
HERRMANN D, 1970, BEITR PLASMAPHYS, V10, P75
[5]   INTERACTION PROCESSES WITH CREATION OF FAST ELECTRONS IN THE LOW-TEMPERATURE PLASMA [J].
KOLOKOLOV, NB ;
KUDRYAVTSEV, AA ;
BLAGOEV, AB .
PHYSICA SCRIPTA, 1994, 50 (04) :371-402
[6]   EXPERIMENTAL-EVIDENCE ON THE NONLOCALITY OF THE ELECTRON-DISTRIBUTION FUNCTION [J].
KORTSHAGEN, U .
PHYSICAL REVIEW E, 1994, 49 (05) :4369-4380
[7]   ELECTRON AND ION DISTRIBUTION-FUNCTIONS IN RF AND MICROWAVE PLASMAS [J].
KORTSHAGEN, U .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 1995, 4 (02) :172-182
[8]   RADIAL DISTRIBUTIONS OF CHARGED-PARTICLE DENSITIES AND ELECTRIC-FIELD STRENGTH IN THE POSITIVE-COLUMN [J].
METZE, A ;
ERNIE, DW ;
OSKAM, HJ .
PHYSICAL REVIEW A, 1989, 39 (08) :4117-4124
[9]   NUMERICAL-SOLUTION OF THE BOLTZMANN-EQUATION IN CYLINDRICAL GEOMETRY [J].
PARKER, GJ ;
HITCHON, WNG ;
LAWLER, JE .
PHYSICAL REVIEW E, 1994, 50 (04) :3210-3219
[10]  
PFAU S, 1969, ANN PHYS-BERLIN, V22, P166