NUMERICAL-SOLUTION OF THE SPATIALLY INHOMOGENEOUS BOLTZMANN-EQUATION AND VERIFICATION OF THE NONLOCAL APPROACH FOR ARGON PLASMA

被引:59
作者
BUSCH, C
KORTSHAGEN, U
机构
[1] Institut für Exerimentalphysik II, Ruhr-Universität Bochum
来源
PHYSICAL REVIEW E | 1995年 / 51卷 / 01期
关键词
D O I
10.1103/PhysRevE.51.280
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
The spatially dependent description of the electron kinetics is of vital interest for the modeling of complete plasma devices. A possible method of dealing with this problem is by the solution of the Boltzmann equation accounting for the spatial inhomogeneity. This approach can be a complicated task. On the other hand, this method may be much more efficient than the treatment of the electron kinetics by simulation techniques. In this paper, the numerical solution of the spatially dependent Boltzmann equation for an argon plasma in cylindrical geometry is reported. A detailed discussion on the boundary conditions is presented. The numerical results are compared to results of the "nonlocal approach," which is a very efficient method for the solution of the spatially dependent Boltzmann equation for the limiting case that the energy relaxation length of electrons exceeds the discharge dimensions. The range of applicability of the nonlocal approach is discussed in terms of the neutral gas density and the inhomogeneity of the electric field. © 1995 The American Physical Society.
引用
收藏
页码:280 / 288
页数:9
相关论文
共 32 条
[1]   ELECTRON ENERGY DISTRIBUTIONS IN STATIONARY DISCHARGES [J].
BERNSTEIN, IB ;
HOLSTEIN, T .
PHYSICAL REVIEW, 1954, 94 (06) :1475-1482
[2]   RF DISCHARGE MODELING CONSIDERING TIME-DEPENDENCE AND SPATIAL NONLOCALITY OF THE ELECTRON-ENERGY SPECTRUM [J].
FEOKTISTOV, VA ;
POPOV, AM ;
POPOVICHEVA, OB ;
RAKHIMOV, AT ;
RAKHIMOVA, TV ;
VOLKOVA, EA .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1991, 19 (02) :163-169
[3]   Measurements of electron energy distribution in low-pressure RF discharges [J].
Godyak, V. A. ;
Piejak, R. B. ;
Alexandrovich, B. M. .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 1992, 1 (01) :36-58
[4]   PARADOXICAL SPATIAL-DISTRIBUTION OF THE ELECTRON-TEMPERATURE IN A LOW-PRESSURE RF DISCHARGE [J].
GODYAK, VA ;
PIEJAK, RB .
APPLIED PHYSICS LETTERS, 1993, 63 (23) :3137-3139
[5]  
Hackbusch W., 1985, SPRINGER SERIES COMP, V4
[6]   RADIALLY DEPENDENT SOLUTIONS OF BOLTZMANN-EQUATION IN LOW-TEMPERATURE PLASMAS USING A MODIFIED 2-TERM EXPANSION [J].
HARTIG, MJ ;
KUSHNER, MJ .
JOURNAL OF APPLIED PHYSICS, 1993, 73 (03) :1080-1090
[7]  
HERRMANN D, 1970, BEITR PLASMAPHYS, V10, P75
[8]   PHYSICAL AND NUMERICAL VERIFICATION OF DISCHARGE CALCULATIONS [J].
HITCHON, WNG ;
PARKER, GJ ;
LAWLER, JE .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1993, 21 (02) :228-238
[9]   AN EFFICIENT SCHEME FOR CONVECTION-DOMINATED TRANSPORT [J].
HITCHON, WNG ;
KOCH, DJ ;
ADAMS, JB .
JOURNAL OF COMPUTATIONAL PHYSICS, 1989, 83 (01) :79-95
[10]   THE SPACE-TIME-AVERAGING PROCEDURE AND MODELING OF THE RF DISCHARGE, .2. MODEL OF COLLISIONAL LOW-PRESSURE RF DISCHARGE [J].
KAGANOVICH, ID ;
TSENDIN, LD .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1992, 20 (02) :66-75