Reduction of transient diffusion from 1-5 keV Si+ ion implantation due to surface annihilation of interstitials

The reduction of transient enhanced diffusion (TED) with reduced implantation energy has been investigated and quantified. A fixed dose of 1 x 10(14) cm(-2) Si+ was implanted at energies ranging from 0.5 to 20 keV into boron doping superlattices and enhanced diffusion of the buried boron marker layers was measured for anneals at 810, 950, and 1050 degrees C. A linearly decreasing dependence of diffusivity enhancement on decreasing Si+ ion range is observed at all temperatures, extrapolating to similar to 1 for 0 keV. This is consistent with our expectation that at zero implantation energy there would be no excess interstitials from the implantation and hence no TED. Monte Carlo modeling and continuum simulations are used to fit the experimental data. The results are consistent with a surface recombination length for interstitials of <10 nm. The data presented here demonstrate that in the range of annealing temperatures of interest for p-n junction formation, TED is reduced at smaller ion implantation energies and that this is due to increased interstitial annihilation at the surface. (C) 1997 American Institute of Physics.