Electroplated hard magnetic material and its application in microelectromechanical systems

被引：12

作者：

Su, YF ^{[1
]}

Wang, H ^{[1
]}

Ding, GF ^{[1
]}

Cui, F ^{[1
]}

Zhang, WP ^{[1
]}

Chen, WY ^{[1
]}

机构：

[1] Shanghai Jiao Tong Univ, Res Inst MicroNano Sci & Technol, Key Lab Thin Film & Micro Fabricat Technol, Minist Educ,Natl Key Lab NanoMicro Fabricat Techn, Shanghai 200030, Peoples R China

来源：

IEEE TRANSACTIONS ON MAGNETICS | 2005年 / 41卷 / 12期

关键词：

bidirectional actuator; electroplated; micro-electromechanical systems (MEMS); permanent magnet;

D O I：

10.1109/TMAG.2005.855644

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We describe the preparation of CoNiMnP-based permanent-magnet material using several sulfate and chloride solutions. We studied eight samples, and all the samples show vertical magnetic anisotropy. Sample8, which was electroplated from a low-concentration chloride solution and under external magnetic field, demonstrates the best magnetic properties with coercivity 2632 Oe, remanence 0.20 T, and maximum magnetic energy 10.185 kJ/m(3). An array structure can avoid the stress between the electroplated layer and the seed layer. The electroplated Co0.8Ni0.1174Mn0.0062P0.0762 permanent magnet has potential for bidirectional actuators in micro-electromechanical systems.

引用

页码：4380 / 4383

页数：4

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