A simple and reliable catalyst patterning technique combined with electric-field-guided growth is utilized to synthesize a sharp and high-aspect-ratio carbon nanocone probe on a tipless cantilever for atomic force microscopy. A single carbon nanodot produced by an electron-beam-induced deposition serves as a convenient chemical etch mask for catalyst patterning, thus eliminating the need for complicated, resist-based, electron-beam lithography for a nanoprobe fabrication. A gradual, sputtering-induced size reduction and eventual removal of the catalyst particle at the probe tip during electric-field-guided growth creates a sharp probe with a tip radius of only a few nanometers. These fabrication processes are amenable for the wafer-scale synthesis of multiple probes. High resolution imaging of three-dimensional features and deep trenches, and mechanical durability enabling continuous operation for many hours without noticeable image deterioration have been demonstrated.
机构:
Univ Calif San Diego, Dept Mech & Aerosp Engn, Mat Sci & Engn Program, La Jolla, CA 92093 USAUniv Calif San Diego, Dept Mech & Aerosp Engn, Mat Sci & Engn Program, La Jolla, CA 92093 USA
AuBuchon, JF
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Chen, LH
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Univ Calif San Diego, Dept Mech & Aerosp Engn, Mat Sci & Engn Program, La Jolla, CA 92093 USAUniv Calif San Diego, Dept Mech & Aerosp Engn, Mat Sci & Engn Program, La Jolla, CA 92093 USA
Chen, LH
;
Gapin, AI
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Univ Calif San Diego, Dept Mech & Aerosp Engn, Mat Sci & Engn Program, La Jolla, CA 92093 USAUniv Calif San Diego, Dept Mech & Aerosp Engn, Mat Sci & Engn Program, La Jolla, CA 92093 USA
Gapin, AI
;
Kim, DW
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Univ Calif San Diego, Dept Mech & Aerosp Engn, Mat Sci & Engn Program, La Jolla, CA 92093 USAUniv Calif San Diego, Dept Mech & Aerosp Engn, Mat Sci & Engn Program, La Jolla, CA 92093 USA
Kim, DW
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Daraio, C
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Univ Calif San Diego, Dept Mech & Aerosp Engn, Mat Sci & Engn Program, La Jolla, CA 92093 USAUniv Calif San Diego, Dept Mech & Aerosp Engn, Mat Sci & Engn Program, La Jolla, CA 92093 USA
Daraio, C
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Jin, SH
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Univ Calif San Diego, Dept Mech & Aerosp Engn, Mat Sci & Engn Program, La Jolla, CA 92093 USAUniv Calif San Diego, Dept Mech & Aerosp Engn, Mat Sci & Engn Program, La Jolla, CA 92093 USA
机构:
Univ Calif San Diego, Dept Mech & Aerosp Engn, Mat Sci & Engn Program, La Jolla, CA 92093 USAUniv Calif San Diego, Dept Mech & Aerosp Engn, Mat Sci & Engn Program, La Jolla, CA 92093 USA
AuBuchon, JF
;
Chen, LH
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Univ Calif San Diego, Dept Mech & Aerosp Engn, Mat Sci & Engn Program, La Jolla, CA 92093 USAUniv Calif San Diego, Dept Mech & Aerosp Engn, Mat Sci & Engn Program, La Jolla, CA 92093 USA
Chen, LH
;
Gapin, AI
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Univ Calif San Diego, Dept Mech & Aerosp Engn, Mat Sci & Engn Program, La Jolla, CA 92093 USAUniv Calif San Diego, Dept Mech & Aerosp Engn, Mat Sci & Engn Program, La Jolla, CA 92093 USA
Gapin, AI
;
Kim, DW
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Univ Calif San Diego, Dept Mech & Aerosp Engn, Mat Sci & Engn Program, La Jolla, CA 92093 USAUniv Calif San Diego, Dept Mech & Aerosp Engn, Mat Sci & Engn Program, La Jolla, CA 92093 USA
Kim, DW
;
Daraio, C
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h-index: 0
机构:
Univ Calif San Diego, Dept Mech & Aerosp Engn, Mat Sci & Engn Program, La Jolla, CA 92093 USAUniv Calif San Diego, Dept Mech & Aerosp Engn, Mat Sci & Engn Program, La Jolla, CA 92093 USA
Daraio, C
;
Jin, SH
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h-index: 0
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Univ Calif San Diego, Dept Mech & Aerosp Engn, Mat Sci & Engn Program, La Jolla, CA 92093 USAUniv Calif San Diego, Dept Mech & Aerosp Engn, Mat Sci & Engn Program, La Jolla, CA 92093 USA