Tip growth model of carbon tubules grown on the glass substrate by plasma enhanced chemical vapor deposition

被引:49
作者
Han, JH
Yoo, JB
Park, CY
Kim, HJ
Park, GS
Yang, M
Han, IT
Lee, N
Yi, WK
Yu, SG
Kim, JM
机构
[1] Samsung Adv Inst Technol, FED Project, Suwon 440600, South Korea
[2] Sungkyunkwan Univ, Ctr Nanotubes & Nanostructured Composite, Suwon 440746, South Korea
关键词
D O I
10.1063/1.1423767
中图分类号
O59 [应用物理学];
学科分类号
摘要
Morphology of Ni tips and microstructures of carbon tubules were investigated and a growth model for carbon tubules was proposed. Triangular shaped Ni tips and piled-cone structure of carbon tubules were observed at the growth temperature of 500 degreesC. At the high growth temperature of 620 degreesC, smoothened edge shaped Ni tips were found and graphite layers became parallel to the growth direction as they were close to the outer wall of carbon tubules. Formation of Ni nuclei for carbon tubule growth was explained by NH3 pre-etching and precipitation of carbon atoms diffused from the surface of the Ni layer. A preferential growth of carbon tubules was observed and explained with the Ni orientation and size effect. A modified tip growth model based on surface diffusion was proposed for the growth mechanism of carbon tubules. (C) 2002 American Institute of Physics.
引用
收藏
页码:483 / 486
页数:4
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