Low-noise real-time measurement of the position of movable structures in MEMS

被引：23

作者：

Langfelder, Giacomo ^{[1
]}

Longoni, Antonio ^{[1
]}

Zaraga, Federico ^{[1
]}

机构：

[1] Politecn Milan, Dipartimento Elettr & Informat, I-20133 Milan, Italy

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2008年 / 148卷 / 02期

关键词：

MEMS sensors readout; Capacitive sensors; Signal conditioning circuit; Long-term measurements;

D O I：

10.1016/j.sna.2008.09.011

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A low-noise, low-perturbing electrostatic position measurement system for capacitive MEMS sensors is described. Asmall-amplitude, high-frequency voltage signal is applied between the movable and fixed plates of the sensing capacitance. The resulting current modulated by the external forces applied to the structure. This high-frequency-shift makes it possible to filter low-noise contributes and minimize readout electrostatic perturbations on the device. Experimental results are reported for a comb-type MEMS test structure with quasi-static, sinusoidal, and impulsive forces. Resolution and long-term stability of nanometric values have been obtained. (c) 2008 Elsevier B.V. All rights reserved.

引用

页码：401 / 406

页数：6

共 10 条

[1] MEMS capacitive accelerometers [J].

Biswas, Karabi ;

Sen, Siddhartha ;

Dutta, Pranab Kumar .

SENSOR LETTERS, 2007, 5 (3-4) :471-484

[2]

BOSSEBOEUF A, 2007, WORLD SCI REV, pCH6

[3] Polysilicon fatigue test-bed monitoring based on the 2nd harmonic of the device current measurement [J].

Ferraris, E ;

Fassi, I ;

De Masi, B ;

Del Sarto, M .

2005 International Conference on MEMS, NANO and Smart Systems, Proceedings, 2005, :55-60

[4]

LAZAROV KV, 2006, 478 CISM INT CTR MEC

[5] Fatigue of polycrystalline silicon for microelectromechanical system applications: crack growth and stability under resonant loading conditions [J].

Muhlstein, CL ;

Howe, RT ;

Ritchie, RO .

MECHANICS OF MATERIALS, 2004, 36 (1-2) :13-33

[6]

MUHLSTEIN CL, 1997, NSF ASFOR ASME WORKS

[7] Dynamic pull-in of parallel-plate and torsional electrostatic MEMS actuators [J].

Nielson, Gregory N. ;

Barbastathis, George .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2006, 15 (04) :811-821

[8] Using dynamic voltage drive in a parallel-plate electrostatic actuator for full-gap travel range and positioning [J].

Rocha, LA ;

Cretu, E ;

Wolffenbuttel, RF .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2006, 15 (01) :69-83

[9]

Sung SK, 2007, INT J CONTROL AUTOM, V5, P35

[10] Design and fabrication of submicrometer, single crystal Si accelerometer [J].

Weigold, JW ;

Najafi, K ;

Pang, SW .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2001, 10 (04) :518-524

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