A model study by FT-IR of the interaction of select cholate dissolution inhibitors with poly(norbornene-alt-maleic anhydride) and its derivatives.

被引：15

作者：

Dabbagh, G ^{[1
]}

Houlihan, FM ^{[1
]}

Rushkin, I ^{[1
]}

Hutton, RS ^{[1
]}

Nalamasu, O ^{[1
]}

Reichmanis, E ^{[1
]}

Gabor, AH ^{[1
]}

Medina, AN ^{[1
]}

机构：

[1] AT&T Bell Labs, Lucent Technol, Murray Hill, NJ 07974 USA

来源：

MICROLITHOGRAPHY 1999: ADVANCES IN RESIST TECHNOLOGY AND PROCESSING XVI, PTS 1 AND 2 | 1999年 / 3678卷

关键词：

D O I：

10.1117/12.350155

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The fundamental nature of the interaction between the polymer matrix and the cholate based dissolution inhibitors (DI's) are being studied by Fourier Transform-Infrared (FT-IR) spectroscopy, It was found that the simple cholate derivatives (t-butyl cholate, t-butyl deoxycholate, and t-butyl chenodeoxycholate) undergo, in a blend with poly(norbornene-alt-maleic anhydride) and in a blend with the terpolymers poly(norbornene-alt-maleic anhydride-co-t-butylacrylate) and poly(norbornene-alt-maleic anhydride-co-acrylic acid), a stronger interaction as seen by shifts in the OH region of the spectra than do blends with dimeric or oligomeric cholates.

引用

页码：86 / 93

页数：8

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