SNOM/AFM microprobe integrated with piezoresistive cantilever beam for multifunctional surface analysis

In scanning near field optical microscopy (SNOM), an optical probe with aperture diameter well below the optical wavelength is moved just over the sample. We developed a new, combined piezoresistive SNOM/AFM probe, which enables precise detection of force interactions acting on the microtip. The described solution offers batch processing typical for semiconductor technology and renders it possible to produce cantilevers playing role of an atomic force detector as well as an optical nano-aperture detector. First results on the probe construction and SNOM/AFM measurements are described. (C) 2002 Elsevier Science B.V. All rights reserved.