Focused ion-beam fabrication of fiber probes with well-defined apertures for use in near-field scanning optical microscopy

被引：45

作者：

Pilevar, S

Edinger, K

Atia, W

Smolyaninov, I

Davis, C

机构：

[1] Univ Maryland, Dept Elect Engn, College Pk, MD 20742 USA

[2] Univ Maryland, Inst Plasma Res, College Pk, MD 20742 USA

来源：

APPLIED PHYSICS LETTERS | 1998年 / 72卷 / 24期

关键词：

D O I：

10.1063/1.121570

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We present a focused ion-beam (FIB) fabrication method for very clean and well-defined subwavelength fiber probes with metallic apertures of a desired diameter for use in near-field scanning optical microscopy. Such probes exhibit improved features compared to probes coated with metal by the conventional angled evaporation technique. Examples of FIB fabricated fiber probes are shown and images of a test sample are presented using one of the probes in a near-field microscope. (C) 1998 American Institute of Physics.

引用

页码：3133 / 3135

页数：3

共 16 条

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