Urbach energy dependence of the stability in amorphous silicon thin-film transistors

被引:22
作者
Wehrspohn, RB [1 ]
Deane, SC
French, ID
Gale, IG
Powell, MJ
Brüggemann, R
机构
[1] Philips Res Labs, Redhill RH1 5HA, Surrey, England
[2] Univ Stuttgart, Inst Phys Elekt, D-70569 Stuttgart, Germany
关键词
D O I
10.1063/1.123349
中图分类号
O59 [应用物理学];
学科分类号
摘要
We investigate the relationship between the stability of amorphous silicon thin-film transistors (a-Si:H TFTs) and the bulk properties of a-Si:H films. Threshold voltage shifts in a-Si:H TFTs are characterized by the thermalization energy E-th for different times and temperatures and fitted by {1 + exp[(E-th - E-a)/kT(0)]}(-2). We find that kT(0) exhibits a clear correlation to the Urbach energy, but the more significant parameter E-a seems to depend only on the deposition-induced microstructure and not on the Urbach energy, the hydrogen content, or the hydrogen diffusion coefficient. (C) 1999 American Institute of Physics. [S0003-6951(99)04922-0].
引用
收藏
页码:3374 / 3376
页数:3
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