Electrical instability of hydrogenated amorphous silicon thin-film transistors for active-matrix liquid-crystal displays

被引:97
作者
Chiang, CS [1 ]
Kanicki, J
Takechi, K
机构
[1] Univ Michigan, Ctr Display Technol & Mfg, Dept Elect Engn & Comp Sci, Ann Arbor, MI 48109 USA
[2] NEC Corp Ltd, Funct Devices Res Labs, Kanagawa, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1998年 / 37卷 / 9A期
关键词
amorphous silicon thin film transistor; threshold voltage; electrical instability; active-matrix liquid-crystal display;
D O I
10.1143/JJAP.37.4704
中图分类号
O59 [应用物理学];
学科分类号
摘要
We investigated the threshold voltage shifts (Delta V-T) of inverted-staggered hydrogenated amorphous silicon (a-Si:H) thin-film transistors (TFTs) induced by steady-state (dc) and pulsed (ac) gate bias-temperature-stress (BTS) conditions. Our study showed that, for an equivalent effective-stress-time, Delta V-T has an apparent pulse-width dependence under negative ETS conditions-the narrower the pulse width, the smaller the Delta V-T. This gate-bias pulse-width dependence is explained by an effective-carrier-concentration model, which relates Delta V-T for negative pulsed gate-bias stress to the concentration of mobile carriers accumulated in the conduction channel along the a-Si:H/gate insulator interface. in addition, our investigation of the methodology of a-Si:H TFT electrical reliability evaluation indicates that, instead of steady-state BTS, pulsed BTS should be used to build the database needed to extrapolate Delta V-T induced by a long-term display operation. Using these experimental results. we have shown that a-Si:H TFTs have a satisfactory electrical reliability for a Icing-term active-matrix liquid-crystal display (AMLCD) operation.
引用
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页码:4704 / 4710
页数:7
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