Latex bead projection nanopatterns

被引:20
作者
Fischer, UC [1 ]
Heimel, J [1 ]
Maas, HJ [1 ]
Hartig, M [1 ]
Hoeppener, S [1 ]
Fuchs, H [1 ]
机构
[1] Univ Munster, Inst Phys, D-48149 Munster, Germany
关键词
scanning near-field optical microscopy; latex beads; nanostructure; nano imprinting;
D O I
10.1002/sia.1165
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Monolayers of monodisperse latex beads of submicron size are used as a convenient mask for physical vapour deposition to produce latex bead projection patterns as nanostructures that have been used often as test structures for near-field optical applications. Variations of the fabrication technique lead to derived nanostructures: flat surface structures are formed by embedding projection patterns consisting of one material into the surface of a different material; complementary projection patterns are formed by using a projection pattern as a mask for a nanoimprinting process; and submicron ring structures are formed in a controlled way from the debris of the latex bead mask. The application of such nanostructures as test patterns for scanning near-field optical microscopy (SNOM) is demonstrated. Copyright (C) 2002 John Wiley Sons, Ltd.
引用
收藏
页码:75 / 80
页数:6
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