Surface topology and fatigue in Si MEMS structures

被引：11

作者：

Allameh, SM ^{[1
]}

Gally, B ^{[1
]}

Brown, S ^{[1
]}

Soboyejo, WO ^{[1
]}

机构：

[1] Princeton Univ, Princeton, NJ 08544 USA

来源：

MECHANICAL PROPERTIES OF STRUCTURAL FILMS | 2001年 / 1413卷

关键词：

surface; topology; fatigue; Si MEMS; AFM; morphology;

D O I：

10.1520/STP10976S

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This paper presents the results of an experimental study of surface topology evolution that leads to crack nucleation and propagation in silicon MEMS structures. Following an initial description of the unactuated surface topology and nanoscale microstructure of polysilicon. the micromechanisms of crack nucleation and propagation are elucidated via in situ atomic force microscopy examination of cyclically actuated comb-drive structures fabricated from polysilicon. It is found that the surface of the polycrystalline silicon MEMS undergoes topological changes that lead to elongation of surface features at the highest tensile point on the surface. A smoothing trend is also observed after a critical stress level is reached.

引用

页码：3 / 15

页数：13

共 23 条

[1]

Brown S. B., 1993, Proceedings. IEEE. Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.93CH3265-6), P99, DOI 10.1109/MEMSYS.1993.296960

[2]

Brown SB, 1997, TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, P591, DOI 10.1109/SENSOR.1997.613720

[3] MICROMECHANICAL FATIGUE TESTING [J].

CONNALLY, JA ;

BROWN, SB .

EXPERIMENTAL MECHANICS, 1993, 33 (02) :81-90

[4] SLOW CRACK-GROWTH IN SINGLE-CRYSTAL SILICON [J].

CONNALLY, JA ;

BROWN, SB .

SCIENCE, 1992, 256 (5063) :1537-1539

[5] Observations of low cycle fatigue of Al thin films for MEMS applications [J].

Cornella, G ;

Vinci, RP ;

Iyer, RS ;

Dauskardt, RH ;

Bravman, JC .

MICROELECTROMECHANICAL STRUCTURES FOR MATERIALS RESEARCH, 1998, 518 :81-86

[6] Using a light microscope to measure motions with nanometer accuracy [J].

Davis, CQ ;

Freeman, DM .

OPTICAL ENGINEERING, 1998, 37 (04) :1299-1304

[7] Lifetime estimates and unique failure mechanisms of the Digital Micromirror Device (DMD) [J].

Douglass, MR .

1998 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM PROCEEDINGS - 36TH ANNUAL, 1998, :9-16

[8]

FREEMAN DM, 1998, P SOL STAT SENS ACT, P150

[9]

Ghandhi S., 1983, VLSI FABRICATION PRI

[10] Electrostatically actuated failure of microfabricated polysilicon fracture mechanics specimens [J].

Kahn, H ;

Ballarini, R ;

Mullen, RL ;

Heuer, AH .

PROCEEDINGS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 1999, 455 (1990) :3807-3823

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