Polychromatic light interferometer for high-accuracy positioning

被引：8

作者：

Dobosz, M ^{[1
]}

Matsumoto, H ^{[1
]}

Seta, K ^{[1
]}

Iwasaki, S ^{[1
]}

机构：

[1] NATL RES LAB METROL,TSUKUBA,IBARAKI 305,JAPAN

来源：

OPTICS AND LASERS IN ENGINEERING | 1996年 / 24卷 / 01期

关键词：

D O I：

10.1016/0143-8166(95)00016-H

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Superposition of different-wavelength, multimode- and single-mode laser diode beams is investigated to locate the fringe of zero interference order in a Twyman-Green interferometer. The possibility of central fringe detection using three multimode laser diodes or one single-mode together with a pair of multimode laser diodes is shown. If a single-mode laser diode is applied, a simultaneous fringe-counting technique for displacement measurement is available. The influence of the angle between wavefronts entering the interferometer is analyzed. A repeatability of about 5 nm is shown for surface position determination when using three-beam source.

引用

页码：43 / 56

页数：14

共 12 条

[1]

CATHEY WT, 1974, OPTICAL INFORMATION, P51

[2] INSTANTANEOUS FRINGE-ORDER IDENTIFICATION USING DUAL BROAD-BAND SOURCES WITH WIDELY SPACED WAVELENGTHS [J].