Focused high frequency ultrasonic transducers for minimally invasive imaging

被引:5
作者
Fleischman, A [1 ]
Modi, R [1 ]
Nair, A [1 ]
Lock-Wood, G [1 ]
Roy, S [1 ]
机构
[1] Cleveland Clin Fdn, Dept Biomed Engn, Cleveland, OH 44195 USA
来源
FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2002年
关键词
D O I
10.1109/MEMSYS.2002.984262
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Spherically focused, high frequency (30-50 MHz) ultrasonic imaging transducers are fabricated by using a piezoelectric polymer film and membrane deflection technique that is compatible with CMOS circuit fabrication. Micromachined ultrasonic transducers with 0.5-2.0 mm-diameter apertures and f-numbers ranging from 1.3-4.0 are fabricated and characterized. The transducers exhibit focused radiation patterns with 50 mum axial resolution and bandwidths of 80-100% around center frequency values. Tissue imaging capabilities of the micromachined ultrasonic transducers are demonstrated through successful imaging of human cadaveric aorta.
引用
收藏
页码:300 / 303
页数:4
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