Field emitter based extractor gauges and residual gas analyzers

Attempts at using the Spindt-type molybdenum held emitter arrays in the extractor gauges and a residual gas analyzer are presented in this article. The sensitivity of the field emitter gauge is as high as 11 Torr(-1). The departure from linearity of the pressure versus ion current measurements did not exceed 10% over the pressure range of 10(-10)-10(-6) Torr. Stable sensitivities for nitrogen, helium, and hydrogen were achieved below 10(-7) Torr with the field emitter residual gas analyzer. The slightly reduced emission current and sensitivity, after long-term operation, are of concern and need to be addressed. Residual gas spectra indicate that when using field emitters; the electron stimulated desorption ions (O+, F+, and Cl+) are reduced as compared to those made using a hot filament source. (C) 1999 American Vacuum Society. [S0734-2101(99)18004-7].