UHV AND XHV PRESSURE MEASUREMENTS

被引：13

作者：

REDHEAD, PA

机构：

来源：

VACUUM | 1993年 / 44卷 / 5-7期

关键词：

D O I：

10.1016/0042-207X(93)90095-R

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The advances in the measurement of both total and partial pressures below 10(-9) torr (uhv and xhv) in the last six years (i.e. since the uhv Gauging Workshop held in 1986) are reviewed and methods for the reduction of errors caused by soft X-ray photoemission and electron stimulated desorption are examined.

引用

页码：559 / 564

页数：6

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