AN AXIAL-EMISSION MAGNETRON SUPPRESSOR GAUGE

被引：9

作者：

CHEN, JZ

SUEN, CD

KUO, YH

机构：

[1] SHANGHAI ELECT TOOL INST,SHANGHAI,PEOPLES R CHINA

[2] BEIJING UNIV,DEPT PHYS,BEIJING,PEOPLES R CHINA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574456

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2373 / 2375

页数：3

共 12 条

[1] NEW DEVELOPMENTS IN THE PRODUCTION AND MEASUREMENT OF ULTRA HIGH VACUUM [J].

ALPERT, D .

JOURNAL OF APPLIED PHYSICS, 1953, 24 (07) :860-876

[2] EXTENSION OF THE LOW PRESSURE RANGE OF THE IONIZATION GAUGE [J].

BAYARD, RT ;

ALPERT, D .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1950, 21 (06) :571-572

[3] AN AXIAL-EMISSION SELF-MODULATING ION GAUGE [J].

CHEN, JZ ;

SUEN, CD ;

KUO, YH .

VACUUM, 1984, 34 (06) :641-642

[4] AN AXIAL-EMISSION MAGNETRON IONIZATION GAUGE [J].

CHEN, JZ ;

SUEN, CD ;

KUO, YH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (01) :14-17

[5] AN AXIAL-EMISSION ULTRAHIGH-VACUUM GAUGE [J].

CHEN, JZ ;

SUEN, CD .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (01) :88-91

[6]

CHEN JZ, 1982, J VAC SOC JPN, V25, P185

[7] SELF-MODULATING ION GAUGE [J].

EDWARDS, D ;

LANNI, C .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (01) :355-356

[8]

IAPTEFF, 1970, VIDE, V146, P103

[9]

LAFFERTY JM, 1960, VACUUM S T, P97

[10] IONIZATION VACUUM GAUGE WITH PHOTOCURRENT SUPPRESSION [J].

SCHUEMANN, WC .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1963, 34 (06) :700-&

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