Wavelength trimming of a microring resonator filter by means of a UV sensitive polymer overlay

被引:63
作者
Chu, ST [1 ]
Pan, WG
Sato, S
Kaneko, T
Little, BE
Kokubun, Y
机构
[1] Kanagawa Acad Sci & Technol, Microphoton Project 3D, Takatsu Ku, Kawasaki, Kanagawa 2130012, Japan
[2] MIT, Elect Res Lab, Cambridge, MA 02139 USA
[3] Yokohama Natl Univ, Dept Elect & Comp Engn, Yokohama, Kanagawa 2408501, Japan
关键词
integrated WDM filters; microring resonators; polysilane; vertical-coupled devices; wavelength trimming;
D O I
10.1109/68.766786
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Trimming of the resonant wavelength of a vertically coupled glass microring resonator channel dropping filter with a photo-induced refractive index change in a dip coated polymer overlay is reported. In this letter, the glass microring resonator has a radius of 19 mu m, a free-spectral range of 10 nm, and a Q value of 800, The maximum wavelength shift observed is 9 nm, which is yielded through an absolute bulk index change in the polymer of 0.044. Trimming is a continuous function of exposure time and dose.
引用
收藏
页码:688 / 690
页数:3
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