Effect on selected-phase growth of crystalline C-N films by controlling nitrogen, hydrogen and methane mixture

被引：20

作者：

Chen, Y

Guo, LP

Wang, EG

机构：

[1] CHINESE ACAD SCI,INST PHYS,STATE KEY LAB SURFACE PHYS,BEIJING 100080,PEOPLES R CHINA

[2] CHINESE ACAD SCI,INST PHYS,NATL LAB SUPERCONDUCTIV,BEIJING 100080,PEOPLES R CHINA

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 1997年 / 16卷 / 07期

基金：

中国国家自然科学基金;

关键词：

D O I：

10.1023/A:1018538410356

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：594 / 597

页数：4

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