Photothermal operation of high frequency nanoelectromechanical systems

被引：42

作者：

Sampathkumar, A. ^{[1
]}

Murray, T. W. ^{[1
]}

Ekinci, K. L. ^{[1
]}

机构：

[1] Boston Univ, Aerosp & Mech Engn Dept, Boston, MA 02215 USA

来源：

APPLIED PHYSICS LETTERS | 2006年 / 88卷 / 22期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1063/1.2208381

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We describe photothermal operation of nanoelectromechanical systems (NEMS) in ambient atmosphere. Using a tightly focused modulated laser source, we have actuated the out-of-plane flexural resonances of bilayered doubly clamped beams. The optically detected displacement profiles in these beams are consistent with a model where the absorbed laser power results in a local temperature rise and a subsequent thermally induced bending moment. The described technique allows probing and actuation of NEMS with exquisite spatial and temporal resolution. From a device perspective, the technique offers immense frequency tunability and may enable future NEMS that can be remotely accessed without electronic coupling. (c) 2006 American Institute of Physics.

引用

页数：3

共 19 条

[1]

Boley B. A., 1997, THEORY THERMAL STRES

[2]

Cleland A. N., 2003, FDN NANOMECHANICS

[3] Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals [J].

Cleland, AN ;

Roukes, ML .

APPLIED PHYSICS LETTERS, 1996, 69 (18) :2653-2655

[4] Nanoelectromechanical systems [J].

Craighead, HG .

SCIENCE, 2000, 290 (5496) :1532-1535

[5] Electromechanical transducers at the nanoscale: Actuation and sensing of motion in nanoelectromechanical systems (NEMS) [J].

Ekinci, KL .

SMALL, 2005, 1 (8-9) :786-797

[6] Ultrasensitive nanoelectromechanical mass detection [J].

Ekinci, KL ;

Huang, XMH ;

Roukes, ML .

APPLIED PHYSICS LETTERS, 2004, 84 (22) :4469-4471

[7] Optical excitation of nanoelectromechanical oscillators [J].

Ilic, B ;

Krylov, S ;

Aubin, K ;

Reichenbach, R ;

Craighead, HG .

APPLIED PHYSICS LETTERS, 2005, 86 (19) :1-3

[8] Attogram detection using nanoelectromechanical oscillators [J].

Ilic, B ;

Craighead, HG ;

Krylov, S ;

Senaratne, W ;

Ober, C ;

Neuzil, P .

JOURNAL OF APPLIED PHYSICS, 2004, 95 (07) :3694-3703

[9] Nanometre-scale displacement sensing using a single electron transistor [J].

Knobel, RG ;

Cleland, AN .

NATURE, 2003, 424 (6946) :291-293

[10] Room-temperature operation of a nanoelectromechanical resonator embedded in a phase-locked loop [J].

Kouh, T ;

Basarir, O ;

Ekinci, KL .

APPLIED PHYSICS LETTERS, 2005, 87 (11)

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