Design and fabrication of artificial lateral line flow sensors

被引：218

作者：

Fan, ZF ^{[1
]}

Chen, J

Zou, J

Bullen, D

Liu, C

Delcomyn, F

机构：

[1] Univ Illinois, Micro Actuators Sensors & Syst Grp, Micro & Nanotechnol Lab, Urbana, IL 61801 USA

[2] Univ Illinois, Dept Entomol, Urbana, IL 61801 USA

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2002年 / 12卷 / 05期

关键词：

D O I：

10.1088/0960-1317/12/5/322

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Underwater flow sensing is important for many robotics and military applications, including underwater robots and vessels. We report the development of micromachined, distributed flow sensors based on a biological inspiration, the fish lateral line sensors. Design and fabrication processes for realizing individual lateral line sensor nodes are discussed in this paper, along with preliminary characterization results.

引用

页码：655 / 661

页数：7

共 27 条

[1]

AYERS J, 1998, P AUT VEH MIN COUNT

[2]

BOILLAT MA, 1995, MICRO ELECTRO MECHANICAL SYSTEMS - IEEE PROCEEDINGS, 1995, P350, DOI 10.1109/MEMSYS.1995.472596

[3]

Bond CE, 1996, BIOL FISHES

[4] Bi-directional fast flow sensor with a large dynamic range [J].

de Bree, HE ;

Jansen, HV ;

Lammerink, TSJ ;

Krijnen, GJM ;

Elwenspoek, M .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1999, 9 (02) :186-189

[5] Three dimensional silicon triple-hot-wire anemometer based on polyimide joints [J].

Ebefors, T ;

Kalvesten, E ;

Stemme, G .

MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS, 1998, :93-98

[6] A coriolis mass flow sensor structure in silicon [J].

Enoksson, P ;

Stemme, G ;

Stemme, E .

NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS, 1996, :156-161

[7]

JIANG FK, 1994, INTERNATIONAL ELECTRON DEVICES MEETING 1994 - IEDM TECHNICAL DIGEST, P139, DOI 10.1109/IEDM.1994.383445

[8] An integrated pressure-flow sensor for correlation measurements in turbulent gas flows [J].

Kalvesten, E ;

Vieider, C ;

Lofdahl, L ;

Stemme, G .

SENSORS AND ACTUATORS A-PHYSICAL, 1996, 52 (1-3) :51-58

[9]

Kovacs G.T., 1998, Micromachined Transducers Sourcebook

[10]

LOFDAHL L, 1992, EXP FLUIDS, V12, P270, DOI 10.1007/BF00187305

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