Adsorbate induced change of equilibrium surface during crystal growth: Si on Si(111)/H

被引:16
作者
HornvonHoegen, M
Golla, A
机构
[1] Institut für Festkörperphysik, Universität Hannover, Hannover, D-30167
关键词
D O I
10.1103/PhysRevLett.76.2953
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Surface termination of Si(lll) with atomic hydrogen changes the homoepitaxial growth from a layer-by-layer mode (bare surface) to a faceting of the whole surface. This decomposition of the planar surface into a ''hill-and-valley'' structure is explained by a change of the surface free energy during Si deposition and H termination. This favors the growth of facets, which are stable as long as the surface is covered with H. The effect is reversible, with the growth mode returning to layer by layer after H desorption.
引用
收藏
页码:2953 / 2956
页数:4
相关论文
共 26 条
[1]  
Bartelt M., IN PRESS
[2]   PHONON-ASSISTED STICKING OF MOLECULAR-HYDROGEN ON SI(111)-(7X7) [J].
BRATU, P ;
HOFER, U .
PHYSICAL REVIEW LETTERS, 1995, 74 (09) :1625-1628
[3]   SURFACTANTS IN EPITAXIAL-GROWTH [J].
COPEL, M ;
REUTER, MC ;
KAXIRAS, E ;
TROMP, RM .
PHYSICAL REVIEW LETTERS, 1989, 63 (06) :632-635
[4]   MEASUREMENT OF SURFACE-DEFECTS BY LOW-ENERGY ELECTRON-DIFFRACTION [J].
HENZLER, M .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 34 (04) :205-214
[5]   ATOMIC STEPS ON SINGLE-CRYSTALS - EXPERIMENTAL METHODS AND PROPERTIES [J].
HENZLER, M .
APPLIED PHYSICS, 1976, 9 (01) :11-17
[6]   REAL-SPACE OBSERVATION OF (111) FACET FORMATION ON VICINAL SI(111) SURFACES [J].
HIBINO, H ;
HOMMA, Y ;
OGINO, T .
PHYSICAL REVIEW B, 1995, 51 (12) :7753-7761
[7]   DEFECT SELF-ANNIHILATION IN SURFACTANT-MEDIATED EPITAXIAL-GROWTH [J].
HORNVONHOEGEN, M ;
LEGOUES, FK ;
COPEL, M ;
REUTER, MC ;
TROMP, RM .
PHYSICAL REVIEW LETTERS, 1991, 67 (09) :1130-1133
[8]  
HORNVONHOEGEN M, 1994, SURF SCI, V321, pL129, DOI 10.1016/0039-6028(94)90016-7
[9]   INFLUENCE OF H ON LOW-TEMPERATURE SI(111) HOMOEPITAXY [J].
HORNVONHOEGEN, M ;
GOLLA, A .
SURFACE SCIENCE, 1995, 337 (1-2) :L777-L782
[10]   SURFACTANTS - PERFECT HETEROEPITAXY OF GE ON SI(111) [J].
HORNVONHOEGEN, M .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1994, 59 (05) :503-515