Alumina coatings on polyethylene terephthalate: Characterisation and X-ray photoelectron spectroscopy study

被引:26
作者
Cueff, R [1 ]
Baud, G [1 ]
Benmalek, M [1 ]
Besse, JP [1 ]
Butruille, JR [1 ]
Jacquet, M [1 ]
机构
[1] CTR RECH VOREPPE,GRP PECHINEY,F-38340 VOREPPE,FRANCE
关键词
alumina; polyethylene terephthalate; sputtering; microstructure; X-ray photoelectron spectroscopy;
D O I
10.1016/0257-8972(95)02692-4
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Thin amorphous alumina coatings have been deposited on polyethylene terephthalate (PET) by r.f. magnetron sputtering in a pure argon plasma. The study deals with the influence of the deposition parameters (plasma pressure and r.f power) on the assembly properties. SEM micrographs show that the alumina microstructure was variable within a wide range, from dense to columnar. The O/Al ratio determined by Rutherford backscattering spectrometry (RBS) was found to increase with plasma pressure. FTIR spectra of oxygen-rich alumina have shown that the excess oxygen in the coatings was essentially due to hydroxyl groups. XPS analyses used to investigate the adhesion mechanism involved at the alumina/PET interface revealed the formation of an interface including Al-O-C bonds.
引用
收藏
页码:96 / 99
页数:4
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