Raman spectroscopy of strained GeSi alloys deposited on Ge substrates

被引:5
作者
Gu, S
Qin, L
Zhang, R
Zhu, X
Zheng, Y
机构
[1] Department of Physics, Nanjing University
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1996年 / 62卷 / 04期
关键词
D O I
10.1007/BF01594238
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The Raman scattering method has been successfully used to investigate the properties of GeSi alloys deposited on Ge substrates in this paper. The effect of Si composition and strain in the GeSi alloy on the Raman shifts of Ge-Ge, Ge-Si and Si-Si phonon modes is studied. The relationship between them have been derived by the assumption that the Raman shifts is nearly linear with Si composition and strain in the GeSi alloys. The experimental data show reasonable agreement with the fits.
引用
收藏
页码:387 / 390
页数:4
相关论文
共 11 条
[1]   ELECTRON INTERSUBBAND ABSORPTION IN GE/SI1-XGEX QUANTUM-WELL STRUCTURES GROWN ON SI(001) SUBSTRATE [J].
LEE, CH ;
WANG, KL .
APPLIED PHYSICS LETTERS, 1994, 64 (10) :1256-1258
[2]   STRAIN-SHIFT COEFFICIENTS FOR PHONONS IN SI1-XGEX EPILAYERS ON SILICON [J].
LOCKWOOD, DJ ;
BARIBEAU, JM .
PHYSICAL REVIEW B, 1992, 45 (15) :8565-8571
[3]   RAMAN-SCATTERING AND STRESS MEASUREMENTS IN SI1-XGEX LAYERS EPITAXIALLY GROWN ON SI(100) BY ION-BEAM SPUTTER DEPOSITION [J].
MEYER, F ;
ZAFRANY, M ;
EIZENBERG, M ;
BESERMAN, R ;
SCHWEBEL, C ;
PELLET, C .
JOURNAL OF APPLIED PHYSICS, 1991, 70 (08) :4268-4277
[4]   RAMAN-SCATTERING ANALYSIS OF RELAXED GEXSI1-X ALLOY LAYERS [J].
MOONEY, PM ;
DACOL, FH ;
TSANG, JC ;
CHU, JO .
APPLIED PHYSICS LETTERS, 1993, 62 (17) :2069-2071
[5]   INDIRECT BAND-GAP AND BAND ALIGNMENT FOR COHERENTLY STRAINED SIXGE1-X BULK ALLOYS ON GERMANIUM (001) SUBSTRATES [J].
PEOPLE, R .
PHYSICAL REVIEW B, 1986, 34 (04) :2508-2510
[6]  
PINCZUK A, 1975, TOP APPL PHYS, V8, P23
[7]  
SUI ZF, 1991, APPL PHYS LETT, V58, P2352
[8]   MEASUREMENTS OF ALLOY COMPOSITION AND STRAIN IN THIN GEXSI1-X LAYERS [J].
TSANG, JC ;
MOONEY, PM ;
DACOL, F ;
CHU, JO .
JOURNAL OF APPLIED PHYSICS, 1994, 75 (12) :8098-8108
[9]  
ZHANG R, 1993, MATER RES SOC S P, V298, P145
[10]  
ZHENG YD, 1990, P 20 INT C PHYS SEM, P869