Monte Carlo simulation study of the effects of nonequilibrium chemical reactions during pulsed laser desorption

被引：60

作者：

Itina, TE ^{[1
]}

Tokarev, VN ^{[1
]}

Marine, W ^{[1
]}

Autric, M ^{[1
]}

机构：

[1] LAB INTERDISCIPLINAIRE ABLAT LASER & APPLICAT,GREC UMR CNRS 6631,F-13009 MARSEILLE,FRANCE

来源：

JOURNAL OF CHEMICAL PHYSICS | 1997年 / 106卷 / 21期

关键词：

D O I：

10.1063/1.473948

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Monte Carlo simulation is used to study the role of chemical reactions in the gas flow of particles laser desorbed from the target into a vacuum. The influence of recombination and dissociation processes on the properties of the gas flow is considered. It was found that chemical reactions have a significant effect on the composition of the desorption jet and on the angular and mean energy distributions of the desorbed particles. The study of these phenomena is of a particular interest for the understanding of the process of thin film deposition by pulsed laser ablation. (C) 1997 American Institute of Physics.

引用

页码：8905 / 8912

页数：8

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