Modification of dielectric surfaces with ultra-short laser pulses

被引:135
作者
Costache, F
Henyk, M
Reif, J
机构
[1] Brandenburg Tech Univ Cottbus, LS Expt Phys 2, D-03044 Cottbus, Germany
[2] IHP, BTU, Joint Lab, D-03044 Cottbus, Germany
关键词
femtosecond laser ablation; dielectrics; sound waves; ripples;
D O I
10.1016/S0169-4332(01)00675-4
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Crater morphology is investigated after femtosecond laser ablation of wide bandgap insulators (BaF2 and CaF2). Experiments performed at a weak laser ablation rate show a particular elastic, sound wave-like structure, frozen on the surface, with a periodicity in the order of some microns and a modulation depth up to 0.5 mum. When superimposed, a periodic fine structure (ripples) is generated, the origin of which cannot be explained in the classical ripple model. We observe a periodicity ranging from 100 to 500 nm, dependent on the laser intensity rather than on the laser wavelength. Based on our recent results, demonstrating an explosive surface decomposition, we assume self-organizing relaxation of a non-equilibrium surface to be responsible for the structures. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:352 / 357
页数:6
相关论文
共 20 条
  • [1] Pulse-width influence on laser structuring of dielectrics
    Ashkenasi, D
    Varel, H
    Rosenfeld, A
    Noack, F
    Campbell, EEB
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 122 (03) : 359 - 363
  • [2] Ultrafast laser-induced phase transitions in amorphous GeSb firms
    Callan, JP
    Kim, AMT
    Roeser, CAD
    Mazur, E
    Solis, J
    Siegel, J
    Afonso, CN
    de Sande, JCG
    [J]. PHYSICAL REVIEW LETTERS, 2001, 86 (16) : 3650 - 3653
  • [3] The role of defects in laser induced positive ion emission from ionic crystals
    Dickinson, JT
    Shin, JJ
    Langford, SC
    [J]. APPLIED SURFACE SCIENCE, 1996, 96-8 : 316 - 320
  • [4] FAUCHET PM, 1983, APPL PHYS A-MATER, V32, P135, DOI 10.1007/BF00616609
  • [5] Hansen JL, 2001, NATURE, V410, P324
  • [6] Ultra short laser pulse induced charged particle emission from wide bandgap crystals
    Henyk, M
    Wolfframm, D
    Reif, J
    [J]. APPLIED SURFACE SCIENCE, 2000, 168 (1-4) : 263 - 266
  • [7] Laser-induced ion emission from dielectrics
    Henyk, M
    Mitzner, R
    Wolfframm, D
    Reif, J
    [J]. APPLIED SURFACE SCIENCE, 2000, 154 : 249 - 255
  • [8] Femtosecond laser ablation from dielectric materials: Comparison to arc discharge erosion
    Henyk, M
    Vogel, N
    Wolfframm, D
    Tempel, A
    Reif, J
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1999, 69 (Suppl 1): : S355 - S358
  • [9] HENYK M, APPL SURF SCI COMBUS
  • [10] Laser ablation of dielectrics with pulse durations between 20 fs and 3 ps
    Kautek, W
    Kruger, J
    Lenzner, M
    Sartania, S
    Spielmann, C
    Krausz, F
    [J]. APPLIED PHYSICS LETTERS, 1996, 69 (21) : 3146 - 3148