Imprinted large-scale high density polymer nanopillars for organic solar cells

被引:97
作者
Aryal, Mukti [1 ]
Buyukserin, Fatih [1 ]
Mielczarek, Kamil [2 ]
Zhao, Xiao-Mei [1 ]
Gao, Jinming [3 ]
Zakhidov, Anvar [2 ]
Hu, Wenchuang [1 ]
机构
[1] Univ Texas Dallas, Dept Elect Engn, Richardson, TX 75080 USA
[2] Univ Texas Dallas, Dept Phys, Richardson, TX 75080 USA
[3] Univ Texas Dallas, Dept Chem, Richardson, TX 75080 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2008年 / 26卷 / 06期
关键词
anodisation; elemental semiconductors; masks; nanolithography; nanoporous materials; organic semiconductors; polymers; silicon; soft lithography; solar cells; sputter etching;
D O I
10.1116/1.2981076
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Nanoimprint with a large-scale nanoporous Si mold is developed to fabricate high density periodic nanopillars (similar to 10(10)/cm(2)) in various functional polymers. A anodic alumina membrane is first obtained using electrochemical anodization. The membrane is used as a mask for a two-step plasma etching process to obtain a Si mold of 50-80 nm wide and 100-900 nm deep pores. The mold is used in nanoimprint lithography to fabricate ordered and high density polymer nanopillars and nanopores in SU-8, hydrogen silsesquixane, polymethylmethacrylate, poly(3-hexylthiophane) (P3HT), and phenyl-C61-butyric acid methyl ester (PCBM). Then, the imprinted P3HT nanopillars were used to make bulk heterojunction solar cells by depositing PCBM on top of the pillars. Imprinting provides a way to precisely control the interdigitized heterojunction morphology, leading to improved solar cell performance.
引用
收藏
页码:2562 / 2566
页数:5
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