Effects of rf bias on cubic BN film synthesis by pulsed Nd:YAG laser deposition

被引：14

作者：

Suda, Y

Nakazono, T

Ebihara, K

Baba, K

机构：

[1] KUMAMOTO UNIV, DEPT ELECT ENGN & COMP SCI, KUMAMOTO 860, JAPAN

[2] TECHNOL CTR NAGASAKI, OMURA, NAGASAKI 856, JAPAN

来源：

THIN SOLID FILMS | 1996年 / 281卷

关键词：

auger electron spectroscopy; boron nitride; Fourier transform infrared spectroscopy (FTIR);

D O I：

10.1016/0040-6090(96)08635-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A method of synthesizing cubic boron nitride (cBN) films by pulsed Nd:YAG laser deposition was investigated. BN films were deposited on heated (650 degrees C) Si(100) substrates using hexagonal BN (hBN) targets. Argon gas was mixed with the reactant nitrogen gas and an r.f. power was applied to the substrate in order to generate a negative d.c. self-bias and enhance the synthesis of the cBN phase. The deposited films were characterized by Fourier transform infrared (FTIR) measurements and Auger electron spectroscopy. FTIR absorption spectroscopy showed that argon ion bombardment with r.f. bias played an important role in the formation of cBN films. Measurements of the optical emission spectrum were performed to estimate the processing plasma state.

引用

页码：324 / 326

页数：3

共 9 条

[1] NORMAL MODES IN HEXAGONAL BORON NITRIDE [J].

GEICK, R ;

PERRY, CH ;

RUPPRECH.G .

PHYSICAL REVIEW, 1966, 146 (02) :543-&

[2] LATTICE INFRARED SPECTRA OF BORON NITRIDE AND BORON MONOPHOSPHIDE [J].

GIELISSE, PJ ;

MITRA, SS ;

PLENDL, JN ;

GRIFFIS, RD ;

MANSUR, LC ;

MARSHALL, R ;

PASCOE, EA .

PHYSICAL REVIEW, 1967, 155 (03) :1039-&

[3] DEPOSITION OF BORON-NITRIDE FILMS BY NITROGEN SPUTTERING FROM A BORON-METAL TARGET [J].

JENSEN, H ;

JENSEN, UM ;

SORENSEN, G .

APPLIED PHYSICS LETTERS, 1995, 66 (12) :1489-1491

[4] COMPOSITION OF EVAPORATED BORON-NITRIDE FILMS BY CARBON-DIOXIDE AND EXCIMER-LASER [J].

KANEDA, K ;

SHIBATA, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (12A) :5652-5655

[5] PHASE-CONTROL OF CUBIC BORON-NITRIDE THIN-FILMS [J].

KESTER, DJ ;

MESSIER, R .

JOURNAL OF APPLIED PHYSICS, 1992, 72 (02) :504-513

[6] GROWTH OF CUBIC BN FILMS ON BETA-SIC BY ION-ASSISTED PULSED-LASER DEPOSITION [J].

MIRKARIMI, PB ;

MEDLIN, DL ;

MCCARTY, KF ;

BARBOUR, JC .

APPLIED PHYSICS LETTERS, 1995, 66 (21) :2813-2815

[7] FORMATION AND PROPERTIES OF CUBIC BORON-NITRIDE FILMS ON TUNGSTEN CARBIDE BY PLASMA CHEMICAL VAPOR-DEPOSITION [J].

OKAMOATO, M ;

UTSUMI, Y ;

OSAKA, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1992, 31 (10) :3455-3460

[8] DEPOSITION OF WURTZITE TYPE BORON-NITRIDE LAYERS BY REACTIVE PULSE PLASMA CRYSTALLIZATION [J].

SOKOLOWSKI, M .

JOURNAL OF CRYSTAL GROWTH, 1979, 46 (01) :136-138

[9]

WATANABE S, 1995, APPL PHYS LETT, V66, P478

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