Role of organic additives in the sol-gel synthesis of porous CaF2 anti-reflective coatings

被引：45

作者：

Fujihara, S ^{[1
]}

Kadota, Y ^{[1
]}

Kimura, T ^{[1
]}

机构：

[1] Keio Univ, Fac Sci & Technol, Dept Appl Chem, Kohoku Ku, Yokohama, Kanagawa 2238522, Japan

来源：

JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY | 2002年 / 24卷 / 02期

关键词：

CaF2; thin film; sol-gel; anti-reflective coating;

D O I：

10.1023/A:1015252010509

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Porous CaF2 anti-reflective coating films were prepared by the sol-gel method. Effects of organic additives on deposition and optical properties of the films were investigated. Amino alcohols (2-aminoethanol, 2-dimethylaminoethanol, and triethanolamine) and alcohols with larger molecular weights (ethyleneglycol, 2-methoxyethanol, cyclohexanol, and 2-(2-n-butoxyethoxy)ethanol) were chosen as the organic additives. Among these additives, cyclohexanol was the most effective to control the surface morphology and the optical properties of the films. By changing the amount of cyclohexanol in the coating solution, it was possible to control the optical thickness of the CaF2 films. Accordingly, the wavelength giving the maximum transmittance could be changed in the UV region.

引用

页码：147 / 154

页数：8

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