Electron emission characterization of diamond thin films grown from a solid carbon source

被引：22

作者：

Jou, S ^{[1
]}

Doerr, HJ ^{[1
]}

Bunshah, RF ^{[1
]}

机构：

[1] UNIV CALIF LOS ANGELES, DEPT MAT SCI & ENGN, LOS ANGELES, CA 90095 USA

来源：

THIN SOLID FILMS | 1996年 / 280卷 / 1-2期

关键词：

electrical properties and measurements; diamond; plasma processing and deposition; nanostructures;

D O I：

10.1016/0040-6090(96)08756-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Diamond films of various morphologies and compositions have been deposited on silicon substrates by a plasma-enhanced chemical transport (PECT) process from a solid carbon source. Electron emission efficiency of these diamond films is related to their morphology and composition. The electric field required to excite emission in a boron-doped polycrystalline diamond film ranged between 20 to 50 MV m(-1) In an undoped conducting nanocrystalline diamond composite film, the field was as low as 5-11 MV m(-1). The cold field electron emission of these films is confirmed from the Fowler-Nordheim plots of the data. Enhancement of electron emission by band-bending and by the nanocrystalline microstructure are discussed. New diamond emitters made of nanocrystalline boron-doped diamond composite are proposed.

引用

页码：256 / 261

页数：6

共 28 条

[1]

BELL RL, 1973, NEGATIVE ELECTRON AF, pCH8

[2] THEORY OF NATIVE DEFECTS, DOPING AND DIFFUSION IN DIAMOND AND SILICON-CARBIDE [J].

BERNHOLC, J ;

KAJIHARA, SA ;

WANG, C ;

ANTONELLI, A ;

DAVIS, RF .

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1992, 11 (1-4) :265-272

[3] THEORY OF IMPURITIES IN DIAMOND [J].

BRIDDON, PR ;

JONES, R .

PHYSICA B-CONDENSED MATTER, 1993, 185 (1-4) :179-189

[4] ELECTRONIC WAVE-FUNCTIONS IN SEMICONDUCTOR CLUSTERS - EXPERIMENT AND THEORY [J].

BRUS, L .

JOURNAL OF PHYSICAL CHEMISTRY, 1986, 90 (12) :2555-2560

[5] ELECTRON ELECTRON AND ELECTRON-HOLE INTERACTIONS IN SMALL SEMICONDUCTOR CRYSTALLITES - THE SIZE DEPENDENCE OF THE LOWEST EXCITED ELECTRONIC STATE [J].

BRUS, LE .

JOURNAL OF CHEMICAL PHYSICS, 1984, 80 (09) :4403-4409

[6] MICROSTRUCTURE OF AMORPHIC DIAMOND FILMS [J].

COLLINS, CB ;

DAVANLOO, F ;

JANDER, DR ;

LEE, TJ ;

PARK, H ;

YOU, JH .

JOURNAL OF APPLIED PHYSICS, 1991, 69 (11) :7862-7870

[7] Electron emission in intense electric fields [J].

Fowler, RH ;

Nordheim, L .

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-CONTAINING PAPERS OF A MATHEMATICAL AND PHYSICAL CHARACTER, 1928, 119 (781) :173-181

[8] DIAMOND COLD-CATHODE [J].

GEIS, MW ;

EFREMOW, NN ;

WOODHOUSE, JD ;

MCALEESE, MD ;

MARCHYWKA, M ;

SOCKER, DG ;

HOCHEDEZ, JF .

IEEE ELECTRON DEVICE LETTERS, 1991, 12 (08) :456-459

[9] QUANTUM PHOTOYIELD OF DIAMOND(111) - STABLE NEGATIVE-AFFINITY EMITTER [J].

HIMPSEL, FJ ;

KNAPP, JA ;

VANVECHTEN, JA ;

EASTMAN, DE .

PHYSICAL REVIEW B, 1979, 20 (02) :624-627

[10] THEORETICAL-STUDY OF FIELD-EMISSION FROM DIAMOND [J].

HUANG, ZH ;

CUTLER, PH ;

MISKOVSKY, NM ;

SULLIVAN, TE .

APPLIED PHYSICS LETTERS, 1994, 65 (20) :2562-2564

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