Excimer laser micromachining: A 15 year perspective

被引：15

作者：

Gower, MC ^{[1
]}

机构：

[1] Exitech Ltd, Oxford OX8 8LH, England

来源：

LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING IV | 1999年 / 3618卷

关键词：

micromachining; excimer lasers; laser ablation; industrial applications; MEMS;

D O I：

10.1117/12.352688

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Reports in 1982 of polymers ablated and etched by excimer laser radiation mark the founding of laser micromachining as a technology that in the intervening period has matured into a manufacturing process used by a diverse range of industries. This paper describes some of these industrial applications.

引用

页码：251 / 261

页数：11

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