Sinusoidally phase-modulated interference microscope for high-speed high-resolution topographic imagery

被引：26

作者：

Dubois, A ^{[1
]}

Vabre, L ^{[1
]}

Boccara, AC ^{[1
]}

机构：

[1] Ecole Super Phys & Chim Ind Ville Paris, CNRS, UPR A0005, Lab Opt Phys, F-75231 Paris 5, France

来源：

OPTICS LETTERS | 2001年 / 26卷 / 23期

关键词：

D O I：

10.1364/OL.26.001873

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We describe an interference microscope that produces topographic images with a minimum acquisition time of 20 ms. The system is based on phase-shifting interferometry with sinusoidal phase modulation induced by the oscillation of an interferometric objective (Michelson or Mirau). A CCD camera captures four images per oscillation period to produce a phase map in real time. The system is installed on a commercial microscope. (C) 2001 Optical Society of America.

引用

页码：1873 / 1875

页数：3

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