High-density arrays of InGaN nanorings, nanodots, and nanoarrows fabricated by a template-assisted approach

被引:38
作者
Wang, Yadong
Zang, Keyan
Chua, Soojin
Sander, Melissa S.
Tripathy, Sudhiranjan
Fonstad, Clifton G.
机构
[1] Singapore MIT Alliance, Singapore 117576, Singapore
[2] Inst Mat Res & Engn, Singapore 117602, Singapore
[3] MIT, Dept Elect & Comp Sci, Cambridge, MA 02139 USA
关键词
D O I
10.1021/jp060419x
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Dense, crystalline arrays of InGaN nanorings, nanodots, and nanoarrows have been fabricated on GaN substrates by template-assisted nano-area selective growth. To create the nanostructures, we have used nanoporous anodic alumina films as templates to pattern nanopores in an SiO2 transfer layer, and then used this patterned SiO2 layer as a template for nitride growth by metalorganic chemical vapor deposition. We have varied the diameter of the deposited nitride nanostructures from 35 to 250 nm by changing the initial anodic alumina template structure. In addition, by controlling the nitride growth time we have created various types of nanostructures, from nanorings to nanoarrows. This structural evolution begins with the nucleation and formation of a nanoring structure, followed by coalescence and growth to form faceted nanodots, and finally lateral overgrowth to form faceted nanoarrows.
引用
收藏
页码:11081 / 11087
页数:7
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