Extending the analysis of EELS spectrum-imaging data, from elemental to bond mapping in complex nanostructures

被引:104
作者
Arenal, R. [1 ]
de la Pena, F. [2 ]
Stephan, O. [2 ]
Walls, M. [2 ]
Tence, M. [2 ]
Loiseau, A. [1 ]
Colliex, C. [2 ]
机构
[1] Off Natl Etud & Rech Aerosp, UMR CNRS 104, Lab Etud Microstruct, F-92322 Chatillon, France
[2] Univ Paris 11, UMR CNRS 8502, Phys Solides Lab, F-91405 Orsay, France
关键词
EELS; Spectrum-imaging; MLS; Chemical bonding maps;
D O I
10.1016/j.ultramic.2008.07.005
中图分类号
TH742 [显微镜];
学科分类号
摘要
Multiple least squares fitting has been employed for long time in elemental electron energy-loss spectroscopy (EELS) analysis, in particular in biology, but with the hypothesis of a rather stable shape for the used core-loss signals. In the present case, we explore its use for identifying the variations in the edges' fine structures in complex boron nitride samples and in particular for mapping the bonding types of boron in such samples. Details about this improved procedure applied to data acquired in the spectrum-imaging mode are reported here. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码:32 / 38
页数:7
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