Dependence of structure and properties of Ba(Zr0.25Ti0.75)O3 thin films on temperature and post-annealing

被引:8
作者
Doan, V. D. O. [1 ]
Lai, M. O. [1 ]
Lu, L. [1 ]
机构
[1] Natl Univ Singapore, Dept Mech Engn, Singapore 117576, Singapore
关键词
D O I
10.1088/0022-3727/41/20/205408
中图分类号
O59 [应用物理学];
学科分类号
摘要
Ba(Zr0.25Ti0.75)O-3 thin film was deposited on a LaNiO3-coated SiO2/Si substrate by pulsed-laser deposition. Crystallinity, (h 0 0) texture and surface texture were found to be improved, and the out-of-plane lattice parameter d, polarization P, dielectric constant epsilon(r)(0) and tunability n(r) were found to increase with increasing deposition temperature or post-annealing duration. Improvement in crystallinity is believed to be the reason for the improved properties. The increase in the out-of-plane lattice parameter of the highly (h 0 0) textured thin film causes the increases in n(r) and P, while the changes in er and nr are closely associated with the changes in epsilon(r)(0) and P. A high tunability of 76% measured at the frequency of 1 MHz could be achieved for the film deposited and annealed at 640 degrees C, showing that Ba(Zr0.25Ti0.75)O-3 thin film would be a potential candidate for future tunable devices.
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页数:6
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