Micro-forming of thin film metallic glass by local laser heating

被引：7

作者：

Jeong, HW ^{[1
]}

Hata, S ^{[1
]}

Shimokohbe, A ^{[1
]}

机构：

[1] Tokyo Inst Technol, Precis & Intelligence Lab, Tokyo, Japan

来源：

FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2002年

关键词：

D O I：

10.1109/MEMSYS.2002.984280

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a new method for fabricating three-dimensional microstructure such as a bent micro beam made of a thin film metallic glass (TFMG). Metallic glasses are kinds of amorphous alloys and have suitable characteristics for microelectromechanical systems (MEMS) because they are isotropic and homogeneous as well as free from defects originated from the crystal structure. Moreover the metallic glasses soften in a certain temperature range called the super cooled liquid region (SCLR), which makes the metallic glasses easily be formed into three-dimensional shapes. In this paper, firstly, TFMG micro beams are fabricated using MEMS process. Secondly, a local laser heating and micro-forming system is introduced to heat and form a beam into a three-dimensional structure. Finally, as an example of a three-dimensional structure, a TFMG micro beam bent 90degrees is realized.

引用

页码：372 / 375

页数：4

共 4 条

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[4] Thermal, mechanical and electrical properties of Pd-based thin-film metallic glass [J].

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JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2001, 40 (9A) :5382-5388

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