In situ wear studies of surface micromachined interfaces subject to controlled loading

被引：39

作者：

Flater, EE

Corwin, AD

de Boer, MP

Carpick, RW ^{[1
]}

机构：

[1] Univ Wisconsin, Dept Engn Phys, Madison, WI 53706 USA

[2] Sandia Natl Labs, Reliabil Phys Dept, Albuquerque, NM 87185 USA

来源：

WEAR | 2006年 / 260卷 / 06期

基金：

美国能源部;

关键词：

microscale wear; microelectromechanical systems (MEMS) reliability; nanotractor; monolayer coatings; polycrystalline silicon; atomic force microscopy (AFM);

D O I：

10.1016/j.wear.2005.02.070

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

Friction and wear are major limiting factors for the development and commercial implementation of devices fabricated by surface micro-machining techniques. These tribological properties are studied using a polycrystalline silicon nanotractor device, which provides abundant, quantitative information about friction and wear at an actual microelectromechanical system (MEMS) interface. This in situ approach to measuring tribological properties of MEMS, combined with high-resolution atomic force microscope (AFM) images of wear tracks, provides insight into the effects of different MEMS surface processing on wear. In particular, monolayer coatings have a significant positive effect, while surface texturing does not strongly affect performance. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：580 / 593

页数：14

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