共 15 条
[4]
Design evaluation of a single-axis precision controlled positioning stage
[J].
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY,
2009, 33 (04)
:418-424
[7]
Frey S, 2012, J VIB CONTROL, V0, P1
[10]
Hiramoto K, 1992, ANN CIRP, V54, P333