AES studies of interdiffusion in thin-film copper-palladium multilayer structures

被引：11

作者：

Bukaluk, A ^{[1
]}

机构：

[1] Akad Tech Rolnicza, Inst Matemat & Fiz, PL-85796 Bydgoszcz, Poland

来源：

VACUUM | 1999年 / 54卷 / 1-4期

关键词：

Auger electron spectroscopy; depth profiles; diffusion;

D O I：

10.1016/S0042-207X(98)00478-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The process of interdiffusion in thin film Cu-Pd multilayer system was studied in the temperature range of 393-493 K for different annealing times using Auger electron spectroscopy (AES) in conjunction with an argon ion sputtering. The changes in Auger depth profiles caused by heating have been converted into compositional changes of diffusing species. On the basis of the concentration distribution of Pd and Cu inside the Pd-Cu multilayer structure the interdiffusion coefficients have been obtained in the studied temperature range. Interdiffusion data have been discussed and compared with diffusion parameters obtained by using different methods. (C) 1999 Elsevier Science Ltd. All rights reserved.

引用

页码：279 / 283

页数：5

共 21 条

[1] QUENCHED-IN LATTICE DEFECTS IN GOLD [J].

BAUERLE, JE ;

KOEHLER, JS .

PHYSICAL REVIEW, 1957, 107 (06) :1493-1498

[2] AES DEPTH PROFILE STUDIES OF INTERDIFFUSION IN THIN POLYCRYSTALLINE AU-AG MULTILAYER FILMS [J].

BUKALUK, A ;

BALA, W .

APPLIED SURFACE SCIENCE, 1990, 45 (01) :57-64

[3] THE EFFECT OF DEGRADATION OF DEPTH RESOLUTION ON THE INTERDIFFUSION DATA IN THIN POLYCRYSTALLINE AU-AG MULTILAYER FILMS [J].

BUKALUK, A .

SURFACE REVIEW AND LETTERS, 1995, 2 (02) :191-196

[4]

BUKALUK A, 1996, P ECASIA 95 MONTR 9, P827

[5] MATRIX EFFECTS IN QUANTITATIVE AUGER ANALYSIS OF DILUTE ALLOYS [J].

HALL, PM ;

MORABITO, JM .

SURFACE SCIENCE, 1979, 83 (02) :391-405

[6]

HANSEN M, 1958, CONSTITUTION BINARY, P612

[7] AUGER STUDY OF PREFERRED SPUTTERING ON AG-AU ALLOY SURFACES [J].

HO, PS ;

LEWIS, JE ;

HOWARD, JK .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01) :322-325

[8] STUDY OF INTERDIFFUSION IN PD/CU MULTILAYERED FILMS BY AUGER DEPTH PROFILING [J].

JEON, IJ ;

HONG, JH ;

LEE, YP .

JOURNAL OF APPLIED PHYSICS, 1994, 75 (12) :7825-7828

[9] LABORATORY EXPERIMENTS EVALUATING EFFECTS OF S AND CU ON A PT-AL2O3 AUTO EXHAUST OXIDATION CATALYSTS [J].

KUMMER, JT .

JOURNAL OF CATALYSIS, 1975, 38 (1-3) :166-171

[10] OBSERVATION AND PREDICTION OF 1ST PHASE FORMATION IN BINARY CU-METAL THIN-FILMS [J].

LI, J ;

STRANE, JW ;

RUSSELL, SW ;

HONG, SQ ;

MAYER, JW ;

MARAIS, TK ;

THERON, CC ;

PRETORIUS, R .

JOURNAL OF APPLIED PHYSICS, 1992, 72 (07) :2810-2816

← 1 2 3 →