OBSERVATION AND PREDICTION OF 1ST PHASE FORMATION IN BINARY CU-METAL THIN-FILMS

被引：47

作者：

LI, J

STRANE, JW

RUSSELL, SW

HONG, SQ

MAYER, JW

MARAIS, TK

THERON, CC

PRETORIUS, R

机构：

[1] NATL ACCELERATOR CTR,VAN DE GRAAFF GRP,FAURE 7131,SOUTH AFRICA

[2] ARIZONA STATE UNIV,CTR SOLID STATE SCI,TEMPE,AZ 85287

[3] ARIZONA STATE UNIV,DEPT CHEM ENGN BIO & MAT SCI,TEMPE,AZ 85287

来源：

JOURNAL OF APPLIED PHYSICS | 1992年 / 72卷 / 07期

关键词：

D O I：

10.1063/1.351533

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

First phase formation has been determined in Cu binary thin film systems with Ti, Zr, Mg, Sb, Pd, and Pt using transmission electron microscopy and Rutherford backscattering spectrometry. CuTi, CuZr, CuMg2, Cu2Sb, Cu3Pd, and Cu3Pt are the first phases to form upon annealing the Cu/metal bilayers. The effective heat of formation model is used to predict first phase formation in 14 Cu/metal systems.

引用

页码：2810 / 2816

页数：7

共 21 条

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